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脈沖偏壓電源具有如下顯著特點(diǎn): 1.恒壓精度高，恒定效果優(yōu)秀占空比、偏壓連續(xù)平穩(wěn)可調(diào)可有效降低沉積溫度，更好的轟擊效果。 2.可通過(guò)保證膜層獲得細(xì)小均勻的晶粒而使膜層的綜合性能得以保證，包括膜層的內(nèi)應(yīng)力、膜與基層的結(jié)合力等指標(biāo)。 3.能夠通過(guò)改變參數(shù)對(duì)薄膜的內(nèi)應(yīng)力進(jìn)行控制，從而達(dá)到沉積厚膜等目的。 4.可有效改變膜層的形核、生長(zhǎng)機(jī)制，促使膜層由島狀生長(zhǎng)向?qū)訝钌L(zhǎng)的轉(zhuǎn)變。

The pulsed bias power supply has the following distinctive features:

1. It boasts high constant voltage accuracy and an excellent constant effect. With an adjustable, continuous, and stable duty cycle and bias, it can effectively reduce deposition temperatures, leading to enhanced sputtering results.

2. It ensures the comprehensive performance of the film layer by producing finely and uniformly crystallized grains. This includes factors such as the film's internal stress and the adhesive strength between the film and the base layer.

3. It can control the internal stress of the thin film by modifying its parameters, thus achieving objectives like depositing thick films.

4. It effectively alters the nucleation and growth mechanisms of the film layer, facilitating the shift from island-like growth to layer-like growth in the film.